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The BiCMOS ModuS U6 technology allows bipolar
and CMOS cells on the same chip supporting
the design of mixed-signal circuits, thus covering a wide field of applications.
The basis is a fully implanted BiCMOS
technology. It is excellent for demanding analog and mixed-signal circuits,
due to the wide range of supply
voltages from 1 V up to 80 V, the large current range and high
gains, the large number of versatile components, the good noise properties and low offset
values, and last but not least the simplified process complexity
leading to a manufacturing method of high reproducibility. Through added layers
complementary LDMOS transistors with a small
on-resistance are available for new circuit designs. PREMA is
presently running 150mm (6") and 200mm
(8") wafer lines with resolutions down to 250nm.
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Key features
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Leading edge BiCMOS process flow
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Supply voltages from 1 V up to 80 V
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Excellent transistor properties from
the pA up to the Amp range, break-down voltages up to 135 V
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Feasibility of high quality analog
and mixed-signal circuits
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Digital functions in CMOS or compact ultra-low-power CCL logic
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MIM capacitors
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short production cycle times
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Transistors like NMOS, PMOS, DMOS, Super Beta NPNs, p channel JFETs, CCL
gates, photodiodes, transistors with integrated Schottky diodes and Super Beta Photo transistors can be easily produced with the ModuS U6
BiCMOS process.
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